Influence of the carbon incorporation on the mechanical properties of TiB₂ thin films prepared by HiPIMS

Nanostructured TiB₂ and TiBC thin films with carbon contents up to 11 at. % were prepared by physical vapor deposition using high power impulse magnetron sputtering (HiPIMS) technology. The influence of carbon incorporation during the deposition of TiB₂ coatings was investigated on the chemical composition, microstructure and mechanical properties by means of scanning electron microscopy, atomic force microscopy, x-ray photoelectron spectroscopy (XPS), x-ray diffraction (XRD), nanoindentation, scratch test, calotest and adhesion Daimler-Benz test. The results indicated that small additions of carbon up to 3 at. % improved the mechanical behavior and increased the adhesion of the TiB₂ thin films. Hardnesses up to 37 GPa were reached and the adhesion of the coating to AISI D2 steel substrates increased from 11 to 18 N. XRD and XPS results showed that the carbon atoms are either occupying interstitial sites within the hexagonal structure of the TiB₂ or forming bonds with titanium and boron atoms. The preferred orientation of the films determined by XRD also changed with the increasing carbon content in the (001) crystalline plane.