Influence of the carbon incorporation on the mechanical properties of TiB₂ thin films prepared by HiPIMS

Material Science

• Adhesion 100%
• High Power Impulse Magnetron Sputtering 100%
• Photoemission Spectroscopy 66%
• Coating 66%
• Crystalline Material 33%
• Mechanical Property 33%
• Spring Steel 33%
• Nanoindentation 33%
• Scanning Electron Microscopy 33%
• Titanium 33%
• Boron 33%
• Atomic Force Microscopy 33%
• Physical Vapor Deposition 33%
• Hardness 33%
• Microstructure 33%

Engineering

• Preferred Orientation 33%
• Titania 33%