Vapor pressures of the copper and yttrium β-diketonate MOCVD precursors

Carles Colominas; Kai H. Lau; Donald L. Hildenbrand; Steven Crouch-Baker; Angel Sanjurjo

doi:10.1021/je0003445

Vapor pressures of the copper and yttrium β-diketonate MOCVD precursors

Carles Colominas, Kai H. Lau, Donald L. Hildenbrand, Steven Crouch-Baker, Angel Sanjurjo

Chemical Engineering and Materials Science Department

Research output: Indexed journal article › Article › peer-review

25 Citations (Scopus)

Abstract

The vapor pressures and vapor molecular weights of the copper and yttrium β-diketonate MOCVD precursors Cu(C₁₁H₁₉O₂)₂ and Y(C₁₁H₁₉O₂)₃ (c) were measure by a torsion-effusion/mass-loss method in the ranges (346 to 375) K and (361 to 387) K, respectively. The molecular weight data indicate that the saturated vapors of both precursors are highly monomeric. Vapor pressures, estimated to be accurate within 5%, are presented in equation form for reliable extrapolation to higher temperatures. The results are compared with other determinations in the literature.

Original language	English
Pages (from-to)	446-450
Number of pages	5
Journal	Journal of Chemical and Engineering Data
Volume	46
Issue number	2
DOIs	https://doi.org/10.1021/je0003445
Publication status	Published - Mar 2001

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title = "Vapor pressures of the copper and yttrium β-diketonate MOCVD precursors",

abstract = "The vapor pressures and vapor molecular weights of the copper and yttrium β-diketonate MOCVD precursors Cu(C11H19O2)2 and Y(C11H19O2)3 (c) were measure by a torsion-effusion/mass-loss method in the ranges (346 to 375) K and (361 to 387) K, respectively. The molecular weight data indicate that the saturated vapors of both precursors are highly monomeric. Vapor pressures, estimated to be accurate within 5%, are presented in equation form for reliable extrapolation to higher temperatures. The results are compared with other determinations in the literature.",

author = "Carles Colominas and Lau, {Kai H.} and Hildenbrand, {Donald L.} and Steven Crouch-Baker and Angel Sanjurjo",

year = "2001",

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AU - Colominas, Carles

AU - Lau, Kai H.

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AU - Crouch-Baker, Steven

AU - Sanjurjo, Angel

PY - 2001/3

Y1 - 2001/3

N2 - The vapor pressures and vapor molecular weights of the copper and yttrium β-diketonate MOCVD precursors Cu(C11H19O2)2 and Y(C11H19O2)3 (c) were measure by a torsion-effusion/mass-loss method in the ranges (346 to 375) K and (361 to 387) K, respectively. The molecular weight data indicate that the saturated vapors of both precursors are highly monomeric. Vapor pressures, estimated to be accurate within 5%, are presented in equation form for reliable extrapolation to higher temperatures. The results are compared with other determinations in the literature.

AB - The vapor pressures and vapor molecular weights of the copper and yttrium β-diketonate MOCVD precursors Cu(C11H19O2)2 and Y(C11H19O2)3 (c) were measure by a torsion-effusion/mass-loss method in the ranges (346 to 375) K and (361 to 387) K, respectively. The molecular weight data indicate that the saturated vapors of both precursors are highly monomeric. Vapor pressures, estimated to be accurate within 5%, are presented in equation form for reliable extrapolation to higher temperatures. The results are compared with other determinations in the literature.

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Vapor pressures of the copper and yttrium β-diketonate MOCVD precursors

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