Abstract
Nanostructured NbC thin films with variable contents of Nb and C were prepared by direct current (DC) magnetron sputtering, and for the first time, via high power impulse magnetron sputtering (HiPIMS) searching for an improvement in the tribological properties. X-ray diffraction shows that increasing the carbon incorporation, the crystalline composition evolves from Nb2C to NbC phase. Further carbon enrichment leads to a nanocomposite structure formed by small NbC crystals (8–14 nm) dispersed in a-C matrix. The friction coefficient varied from high friction (0.8) to low friction (0.25) and the hardness values between 20 and 11 GPa depending on the film composition. A densification of the coatings by changing the methodology from DC to HiPIMS was not observed.
| Original language | English |
|---|---|
| Article number | 128334 |
| Number of pages | 4 |
| Journal | Materials Letters |
| Volume | 277 |
| DOIs | |
| Publication status | Published - 15 Oct 2020 |
Keywords
- Nanocomposites
- Physical vapour deposition
- Sputtering
- Thin films
- Wear and tribology
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