TiSiN nanocomposite coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)

J. Perez-Mariano; K. H. Lau; A. Sanjurjo; J. Caro; D. Casellas; C. Colominas

doi:10.1016/j.surfcoat.2006.03.029

TiSiN nanocomposite coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)

J. Perez-Mariano, K. H. Lau, A. Sanjurjo, J. Caro, D. Casellas, C. Colominas

Research output: Indexed journal article › Article › peer-review

37 Citations (Scopus)

Abstract

TiSiN nanocomposite coatings were deposited on stainless steel by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) by reaction of TiCl₄ and SiCl₄ with NH₃ at 850 °C. Coatings were characterized by means of GD-OES, XPS and XRD. TiSiN coatings with a Si content of 9 at.% showed a hardness of 28 GPa (the hardness of TiN and SiN_x coatings was around 21 GPa) and a lower oxidation rate under dry air at 600 °C. Our results show for the first time that AP/FBR-CVD can be tuned for the deposition of nanocomposite ceramic coatings.

Original language	English
Pages (from-to)	2217-2225
Number of pages	9
Journal	Surface and Coatings Technology
Volume	201
Issue number	6
DOIs	https://doi.org/10.1016/j.surfcoat.2006.03.029
Publication status	Published - 4 Dec 2006

Keywords

Coating
Fluidized bed
Nanocomposite
Silicon nitride
Titanium nitride

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10.1016/j.surfcoat.2006.03.029

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@article{d801888e72604ff3b46a0af484d167c3,

title = "TiSiN nanocomposite coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)",

abstract = "TiSiN nanocomposite coatings were deposited on stainless steel by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) by reaction of TiCl4 and SiCl4 with NH3 at 850 °C. Coatings were characterized by means of GD-OES, XPS and XRD. TiSiN coatings with a Si content of 9 at.% showed a hardness of 28 GPa (the hardness of TiN and SiNx coatings was around 21 GPa) and a lower oxidation rate under dry air at 600 °C. Our results show for the first time that AP/FBR-CVD can be tuned for the deposition of nanocomposite ceramic coatings.",

keywords = "Coating, Fluidized bed, Nanocomposite, Silicon nitride, Titanium nitride",

author = "J. Perez-Mariano and Lau, {K. H.} and A. Sanjurjo and J. Caro and D. Casellas and C. Colominas",

note = "Funding Information: The authors wish to thank the following companies and institutions for their collaboration: CTM Centre Tecnol{\`o}gic, Institut Qu{\'i}mic de Sarri{\`a}, SRI International and Tratamientos T{\'e}rmicos Carreras. JP gratefully acknowledges the financial support of DURSI (Generalitat de Catalunya) and the European Social Fund.",

year = "2006",

month = dec,

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doi = "10.1016/j.surfcoat.2006.03.029",

language = "English",

volume = "201",

pages = "2217--2225",

journal = "Surface and Coatings Technology",

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T1 - TiSiN nanocomposite coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)

AU - Perez-Mariano, J.

AU - Lau, K. H.

AU - Sanjurjo, A.

AU - Caro, J.

AU - Casellas, D.

AU - Colominas, C.

N1 - Funding Information: The authors wish to thank the following companies and institutions for their collaboration: CTM Centre Tecnològic, Institut Químic de Sarrià, SRI International and Tratamientos Térmicos Carreras. JP gratefully acknowledges the financial support of DURSI (Generalitat de Catalunya) and the European Social Fund.

PY - 2006/12/4

Y1 - 2006/12/4

N2 - TiSiN nanocomposite coatings were deposited on stainless steel by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) by reaction of TiCl4 and SiCl4 with NH3 at 850 °C. Coatings were characterized by means of GD-OES, XPS and XRD. TiSiN coatings with a Si content of 9 at.% showed a hardness of 28 GPa (the hardness of TiN and SiNx coatings was around 21 GPa) and a lower oxidation rate under dry air at 600 °C. Our results show for the first time that AP/FBR-CVD can be tuned for the deposition of nanocomposite ceramic coatings.

AB - TiSiN nanocomposite coatings were deposited on stainless steel by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) by reaction of TiCl4 and SiCl4 with NH3 at 850 °C. Coatings were characterized by means of GD-OES, XPS and XRD. TiSiN coatings with a Si content of 9 at.% showed a hardness of 28 GPa (the hardness of TiN and SiNx coatings was around 21 GPa) and a lower oxidation rate under dry air at 600 °C. Our results show for the first time that AP/FBR-CVD can be tuned for the deposition of nanocomposite ceramic coatings.

KW - Coating

KW - Fluidized bed

KW - Nanocomposite

KW - Silicon nitride

KW - Titanium nitride

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M3 - Article

AN - SCOPUS:33751016647

SN - 0257-8972

VL - 201

SP - 2217

EP - 2225

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 6

ER -

TiSiN nanocomposite coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)

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Keywords

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