TiN/SiNx submicronic multilayer coatings obtained by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)

J. Perez-Mariano, J. Caro, C. Colominas*

*Corresponding author for this work

Research output: Indexed journal article › Article › peer-review

16 Citations (Scopus)

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