TY - JOUR
T1 - TiN/SiNx submicronic multilayer coatings obtained by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)
AU - Perez-Mariano, J.
AU - Caro, J.
AU - Colominas, C.
N1 - Funding Information:
The authors wish to thank the following companies and institutions for their collaboration: Institut Químic de Sarrià, SRI International, Universitat de Barcelona (Prof. J. Esteve) and Tratamientos Térmicos Carreras. JP gratefully acknowledges the financial support of DURSI (Generalitat de Catalunya) and European Social Fund. CC and JP would like to express their gratitude to Dr. A.Sanjurjo and Dr. K.H. Lau (SRI International) for their continuous support and helpful suggestions.
PY - 2006/12/20
Y1 - 2006/12/20
N2 - TiN/SiNx multilayer coatings were deposited on stainless steel by Chemical Vapor Deposition in a Fluidized Bed Reactor at Atmospheric Pressure (AP/FBR-CVD) by reaction of TiCl4 and SiCl4 with NH3 at 850 °C. Due to the immiscibility of crystalline TiN and amorphous SiNx, interdiffusion between layers is avoided even at the high working temperature. The thickness of the individual layer was in the nanometer range. Coatings were characterized by means of SEM, TEM, GD-OES, SIMS, XRD and nanoindentation. A mechanism for the growth rate and diffusion of Ti and Si into the steel is discussed.
AB - TiN/SiNx multilayer coatings were deposited on stainless steel by Chemical Vapor Deposition in a Fluidized Bed Reactor at Atmospheric Pressure (AP/FBR-CVD) by reaction of TiCl4 and SiCl4 with NH3 at 850 °C. Due to the immiscibility of crystalline TiN and amorphous SiNx, interdiffusion between layers is avoided even at the high working temperature. The thickness of the individual layer was in the nanometer range. Coatings were characterized by means of SEM, TEM, GD-OES, SIMS, XRD and nanoindentation. A mechanism for the growth rate and diffusion of Ti and Si into the steel is discussed.
KW - Chemical vapor deposition
KW - FBR-CVD
KW - Fluidized bed
KW - Multilayer coating
UR - http://www.scopus.com/inward/record.url?scp=33751256285&partnerID=8YFLogxK
UR - https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=pure_univeritat_ramon_llull&SrcAuth=WosAPI&KeyUT=WOS:000243149700038&DestLinkType=FullRecord&DestApp=WOS_CPL
U2 - 10.1016/j.surfcoat.2006.08.032
DO - 10.1016/j.surfcoat.2006.08.032
M3 - Article
AN - SCOPUS:33751256285
SN - 0257-8972
VL - 201
SP - 4021
EP - 4025
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
IS - 7 SPEC. ISS.
T2 - International Conference on Metallurgical Coatings and Thin Films, ICMCTF 2006
Y2 - 1 January 2006 through 5 May 2006
ER -