Abstract
TiBC coatings with different phase compositions (nanocrystalline TiBxCy or TiB2 phases mixed or not with amorphous carbon, a-C) were prepared by magnetron sputtering. These coatings were comparatively studied in terms of phase stability after thermal annealing at 250, 500, 750, and 1000 degrees C in argon using Raman and x-ray absorption near-edge spectroscopy techniques. The main differences were observed at temperatures above 500 degrees C when oxidation processes occur and the mechanical properties deteriorate. At 1000 degrees C, the samples were fully oxidized forming a-C, TiO2, and B2O3 as final products. Higher hardness and reduced indentation modulus values and better tribological properties were observed at 750 degrees C for nanocomposite structures including amorphous carbon and ternary TiBxCy phases. This behavior is attributed to a protective effect associated with the a-C phase which is achieved by the encapsulation of the nanocrystals in the coating and the better hard/lubricant phase ratio associated with this type of coating. (C) 2014 American Vacuum Society.
Original language | English |
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Article number | 021508 |
Number of pages | 7 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 32 |
Issue number | 2 |
DOIs | |
Publication status | Published - Mar 2014 |
Externally published | Yes |
Keywords
- Nanocomposite thin-films
- B-n coatings
- Thermal-stability
- Oxidation resistance
- Hard coatings
- Raman
- Microstructure
- Behavior
- Plasma
- Carbon