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Extended X-ray absorption fine structure (EXAFS) investigations of Ti bonding environment in sputter-deposited nanocomposite TiBC/a-C thin films

  • J. L. Endrino*
  • , M. D. Abad
  • , R. Gago
  • , D. Horwat
  • , I. Jiménez
  • , J. C. Sánchez-López
  • *Corresponding author for this work

Research output: Indexed journal article Conference articlepeer-review

11 Citations (Web of Science)

Abstract

In this study, we have successfully used the extended X-ray absorption fine structure (EXAFS) technique at the Ti-K edge to extract the local structure in a set of nanocomposite TiBC/a-C coatings deposited by a combined d.c.-pulsed and r.f.-magnetron sputtering deposition process. The sequence of Fourier transform spectra in the deposited films shows that there is an increase in the number of Ti-C bonds in the films of higher carbon content in parallel with the increment of the total carbon content. In addition, Ti-K EXAFS spectra indicate that in all the deposited TiBC/a-C films, first-shell neighbours are in a nearer structural arrangement than the one expected for a bulk hexagonal TiB2, which could be due to the formation of mixed Ti-B-C compound in a structural unit similar to the one found in h-TiB2.

Original languageEnglish
Article number012012
Number of pages4
JournalIOP Conference Series: Materials Science and Engineering
Volume12
Issue number1
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event4th International Conference on Innovation in Thin Film Processing and Characterization, ITFPC 2009 - Nancy, France
Duration: 17 Nov 200920 Nov 2009

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