Abstract
In this study, we have successfully used the extended X-ray absorption fine structure (EXAFS) technique at the Ti-K edge to extract the local structure in a set of nanocomposite TiBC/a-C coatings deposited by a combined d.c.-pulsed and r.f.-magnetron sputtering deposition process. The sequence of Fourier transform spectra in the deposited films shows that there is an increase in the number of Ti-C bonds in the films of higher carbon content in parallel with the increment of the total carbon content. In addition, Ti-K EXAFS spectra indicate that in all the deposited TiBC/a-C films, first-shell neighbours are in a nearer structural arrangement than the one expected for a bulk hexagonal TiB2, which could be due to the formation of mixed Ti-B-C compound in a structural unit similar to the one found in h-TiB2.
| Original language | English |
|---|---|
| Article number | 012012 |
| Number of pages | 4 |
| Journal | IOP Conference Series: Materials Science and Engineering |
| Volume | 12 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2010 |
| Externally published | Yes |
| Event | 4th International Conference on Innovation in Thin Film Processing and Characterization, ITFPC 2009 - Nancy, France Duration: 17 Nov 2009 → 20 Nov 2009 |
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