TY - JOUR
T1 - Extended X-ray absorption fine structure (EXAFS) investigations of Ti bonding environment in sputter-deposited nanocomposite TiBC/a-C thin films
AU - Endrino, J. L.
AU - Abad, M. D.
AU - Gago, R.
AU - Horwat, D.
AU - Jiménez, I.
AU - Sánchez-López, J. C.
N1 - Publisher Copyright:
© 2010 IOP Publishing Ltd.
PY - 2010
Y1 - 2010
N2 - In this study, we have successfully used the extended X-ray absorption fine structure (EXAFS) technique at the Ti-K edge to extract the local structure in a set of nanocomposite TiBC/a-C coatings deposited by a combined d.c.-pulsed and r.f.-magnetron sputtering deposition process. The sequence of Fourier transform spectra in the deposited films shows that there is an increase in the number of Ti-C bonds in the films of higher carbon content in parallel with the increment of the total carbon content. In addition, Ti-K EXAFS spectra indicate that in all the deposited TiBC/a-C films, first-shell neighbours are in a nearer structural arrangement than the one expected for a bulk hexagonal TiB2, which could be due to the formation of mixed Ti-B-C compound in a structural unit similar to the one found in h-TiB2.
AB - In this study, we have successfully used the extended X-ray absorption fine structure (EXAFS) technique at the Ti-K edge to extract the local structure in a set of nanocomposite TiBC/a-C coatings deposited by a combined d.c.-pulsed and r.f.-magnetron sputtering deposition process. The sequence of Fourier transform spectra in the deposited films shows that there is an increase in the number of Ti-C bonds in the films of higher carbon content in parallel with the increment of the total carbon content. In addition, Ti-K EXAFS spectra indicate that in all the deposited TiBC/a-C films, first-shell neighbours are in a nearer structural arrangement than the one expected for a bulk hexagonal TiB2, which could be due to the formation of mixed Ti-B-C compound in a structural unit similar to the one found in h-TiB2.
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U2 - 10.1088/1757-899X/12/1/012012
DO - 10.1088/1757-899X/12/1/012012
M3 - Conference article
AN - SCOPUS:84908417526
SN - 1757-8981
VL - 12
JO - IOP Conference Series: Materials Science and Engineering
JF - IOP Conference Series: Materials Science and Engineering
IS - 1
M1 - 012012
T2 - 4th International Conference on Innovation in Thin Film Processing and Characterization, ITFPC 2009
Y2 - 17 November 2009 through 20 November 2009
ER -