A Ku-band RF-MEMS frequency-reconfigurable multimodal bandpass filter

Adrián Contreras; Jasmina Casals-Terré; Lluís Pradell; Flavio Giacomozzi; Jacopo Iannacci; Miquel Ribó

doi:10.1017/S1759078714000567

A Ku-band RF-MEMS frequency-reconfigurable multimodal bandpass filter

Adrián Contreras
, Jasmina Casals-Terré
, Lluís Pradell^*
, Flavio Giacomozzi
, Jacopo Iannacci
, Miquel Ribó

^*Corresponding author for this work

Research output: Indexed journal article › Article › peer-review

9 Citations (Scopus)

Abstract

In this paper, a uniplanar RF-MEMS second-order bandpass filter with reconfigurable center frequency is presented. It is based on quarter-wavelength slotline resonators and coplanar waveguide (CPW)-to-slotline multimodal immitance inverters (MIIs), which are reconfigured using RF-MEMS switchable CPW air-bridges (SABs). The filter can be adequately explained and designed using multimodal theory and circuit models. A surface micromachining process on high-resistivity silicon substrate was used to fabricate the filter. Experimental results show frequency reconfiguration from 12 to 13 GHz, maintaining the same relative bandwidth, and insertion losses of 4.6 and 4.7 dB, respectively.

Original language	English
Pages (from-to)	277-285
Number of pages	9
Journal	International Journal of Microwave and Wireless Technologies
Volume	6
Issue number	3-4
DOIs	https://doi.org/10.1017/S1759078714000567
Publication status	Published - 2014
Externally published	Yes

Keywords

Filters
Modeling
Passive components and circuits
RF-MEMS and MOEMS
Si-based devices and IC technologies
Simulation and characterization of devices and circuits

Access to Document

10.1017/S1759078714000567

Cite this

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title = "A Ku-band RF-MEMS frequency-reconfigurable multimodal bandpass filter",

abstract = "In this paper, a uniplanar RF-MEMS second-order bandpass filter with reconfigurable center frequency is presented. It is based on quarter-wavelength slotline resonators and coplanar waveguide (CPW)-to-slotline multimodal immitance inverters (MIIs), which are reconfigured using RF-MEMS switchable CPW air-bridges (SABs). The filter can be adequately explained and designed using multimodal theory and circuit models. A surface micromachining process on high-resistivity silicon substrate was used to fabricate the filter. Experimental results show frequency reconfiguration from 12 to 13 GHz, maintaining the same relative bandwidth, and insertion losses of 4.6 and 4.7 dB, respectively.",

keywords = "Filters, Modeling, Passive components and circuits, RF-MEMS and MOEMS, Si-based devices and IC technologies, Simulation and characterization of devices and circuits",

author = "Adri{\'a}n Contreras and Jasmina Casals-Terr{\'e} and Llu{\'i}s Pradell and Flavio Giacomozzi and Jacopo Iannacci and Miquel Rib{\'o}",

year = "2014",

doi = "10.1017/S1759078714000567",

language = "English",

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pages = "277--285",

journal = "International Journal of Microwave and Wireless Technologies",

issn = "1759-0787",

publisher = "Cambridge University Press",

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TY - JOUR

T1 - A Ku-band RF-MEMS frequency-reconfigurable multimodal bandpass filter

AU - Contreras, Adrián

AU - Casals-Terré, Jasmina

AU - Pradell, Lluís

AU - Giacomozzi, Flavio

AU - Iannacci, Jacopo

AU - Ribó, Miquel

PY - 2014

Y1 - 2014

N2 - In this paper, a uniplanar RF-MEMS second-order bandpass filter with reconfigurable center frequency is presented. It is based on quarter-wavelength slotline resonators and coplanar waveguide (CPW)-to-slotline multimodal immitance inverters (MIIs), which are reconfigured using RF-MEMS switchable CPW air-bridges (SABs). The filter can be adequately explained and designed using multimodal theory and circuit models. A surface micromachining process on high-resistivity silicon substrate was used to fabricate the filter. Experimental results show frequency reconfiguration from 12 to 13 GHz, maintaining the same relative bandwidth, and insertion losses of 4.6 and 4.7 dB, respectively.

AB - In this paper, a uniplanar RF-MEMS second-order bandpass filter with reconfigurable center frequency is presented. It is based on quarter-wavelength slotline resonators and coplanar waveguide (CPW)-to-slotline multimodal immitance inverters (MIIs), which are reconfigured using RF-MEMS switchable CPW air-bridges (SABs). The filter can be adequately explained and designed using multimodal theory and circuit models. A surface micromachining process on high-resistivity silicon substrate was used to fabricate the filter. Experimental results show frequency reconfiguration from 12 to 13 GHz, maintaining the same relative bandwidth, and insertion losses of 4.6 and 4.7 dB, respectively.

KW - Filters

KW - Modeling

KW - Passive components and circuits

KW - RF-MEMS and MOEMS

KW - Si-based devices and IC technologies

KW - Simulation and characterization of devices and circuits

UR - https://www.scopus.com/pages/publications/84901983493

U2 - 10.1017/S1759078714000567

DO - 10.1017/S1759078714000567

M3 - Article

AN - SCOPUS:84901983493

SN - 1759-0787

VL - 6

SP - 277

EP - 285

JO - International Journal of Microwave and Wireless Technologies

JF - International Journal of Microwave and Wireless Technologies

IS - 3-4

ER -

A Ku-band RF-MEMS frequency-reconfigurable multimodal bandpass filter

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Keywords

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