Vapor pressures of the copper and yttrium β-diketonate MOCVD precursors

Carles Colominas; Kai H. Lau; Donald L. Hildenbrand; Steven Crouch-Baker; Angel Sanjurjo

doi:10.1021/je0003445

Vapor pressures of the copper and yttrium β-diketonate MOCVD precursors

Carles Colominas, Kai H. Lau, Donald L. Hildenbrand, Steven Crouch-Baker, Angel Sanjurjo

Departament d'Enginyeria Química i Ciència de Materials

Producció científica: Article en revista indexada › Article › Avaluat per experts

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The vapor pressures and vapor molecular weights of the copper and yttrium β-diketonate MOCVD precursors Cu(C₁₁H₁₉O₂)₂ and Y(C₁₁H₁₉O₂)₃ (c) were measure by a torsion-effusion/mass-loss method in the ranges (346 to 375) K and (361 to 387) K, respectively. The molecular weight data indicate that the saturated vapors of both precursors are highly monomeric. Vapor pressures, estimated to be accurate within 5%, are presented in equation form for reliable extrapolation to higher temperatures. The results are compared with other determinations in the literature.

Idioma original	Anglès
Pàgines (de-a)	446-450
Nombre de pàgines	5
Revista	Journal of Chemical and Engineering Data
Volum	46
Número	2
DOIs	https://doi.org/10.1021/je0003445
Estat de la publicació	Publicada - de març 2001

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title = "Vapor pressures of the copper and yttrium β-diketonate MOCVD precursors",

abstract = "The vapor pressures and vapor molecular weights of the copper and yttrium β-diketonate MOCVD precursors Cu(C11H19O2)2 and Y(C11H19O2)3 (c) were measure by a torsion-effusion/mass-loss method in the ranges (346 to 375) K and (361 to 387) K, respectively. The molecular weight data indicate that the saturated vapors of both precursors are highly monomeric. Vapor pressures, estimated to be accurate within 5%, are presented in equation form for reliable extrapolation to higher temperatures. The results are compared with other determinations in the literature.",

author = "Carles Colominas and Lau, {Kai H.} and Hildenbrand, {Donald L.} and Steven Crouch-Baker and Angel Sanjurjo",

year = "2001",

month = mar,

doi = "10.1021/je0003445",

language = "English",

volume = "46",

pages = "446--450",

journal = "Journal of Chemical and Engineering Data",

issn = "0021-9568",

publisher = "American Chemical Society",

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T1 - Vapor pressures of the copper and yttrium β-diketonate MOCVD precursors

AU - Colominas, Carles

AU - Lau, Kai H.

AU - Hildenbrand, Donald L.

AU - Crouch-Baker, Steven

AU - Sanjurjo, Angel

PY - 2001/3

Y1 - 2001/3

N2 - The vapor pressures and vapor molecular weights of the copper and yttrium β-diketonate MOCVD precursors Cu(C11H19O2)2 and Y(C11H19O2)3 (c) were measure by a torsion-effusion/mass-loss method in the ranges (346 to 375) K and (361 to 387) K, respectively. The molecular weight data indicate that the saturated vapors of both precursors are highly monomeric. Vapor pressures, estimated to be accurate within 5%, are presented in equation form for reliable extrapolation to higher temperatures. The results are compared with other determinations in the literature.

AB - The vapor pressures and vapor molecular weights of the copper and yttrium β-diketonate MOCVD precursors Cu(C11H19O2)2 and Y(C11H19O2)3 (c) were measure by a torsion-effusion/mass-loss method in the ranges (346 to 375) K and (361 to 387) K, respectively. The molecular weight data indicate that the saturated vapors of both precursors are highly monomeric. Vapor pressures, estimated to be accurate within 5%, are presented in equation form for reliable extrapolation to higher temperatures. The results are compared with other determinations in the literature.

UR - http://www.scopus.com/inward/record.url?scp=0035271487&partnerID=8YFLogxK

U2 - 10.1021/je0003445

DO - 10.1021/je0003445

M3 - Article

AN - SCOPUS:0035271487

SN - 0021-9568

VL - 46

SP - 446

EP - 450

JO - Journal of Chemical and Engineering Data

JF - Journal of Chemical and Engineering Data

IS - 2

ER -

Vapor pressures of the copper and yttrium β-diketonate MOCVD precursors

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