TiSiN nanocomposite coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)

J. Perez-Mariano; K. H. Lau; A. Sanjurjo; J. Caro; D. Casellas; C. Colominas

doi:10.1016/j.surfcoat.2006.03.029

TiSiN nanocomposite coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)

J. Perez-Mariano
, K. H. Lau
, A. Sanjurjo
, J. Caro
, D. Casellas
, C. Colominas^*

^*Autor corresponent d’aquest treball

Producció científica: Article en revista indexada › Article › Avaluat per experts

38 Cites (Scopus)

Resum

TiSiN nanocomposite coatings were deposited on stainless steel by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) by reaction of TiCl₄ and SiCl₄ with NH₃ at 850 °C. Coatings were characterized by means of GD-OES, XPS and XRD. TiSiN coatings with a Si content of 9 at.% showed a hardness of 28 GPa (the hardness of TiN and SiN_x coatings was around 21 GPa) and a lower oxidation rate under dry air at 600 °C. Our results show for the first time that AP/FBR-CVD can be tuned for the deposition of nanocomposite ceramic coatings.

Idioma original	Anglès
Pàgines (de-a)	2217-2225
Nombre de pàgines	9
Revista	Surface and Coatings Technology
Volum	201
Número	6
DOIs	https://doi.org/10.1016/j.surfcoat.2006.03.029
Estat de la publicació	Publicada - 4 de des. 2006

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10.1016/j.surfcoat.2006.03.029

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@article{d801888e72604ff3b46a0af484d167c3,

title = "TiSiN nanocomposite coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)",

abstract = "TiSiN nanocomposite coatings were deposited on stainless steel by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) by reaction of TiCl4 and SiCl4 with NH3 at 850 °C. Coatings were characterized by means of GD-OES, XPS and XRD. TiSiN coatings with a Si content of 9 at.\% showed a hardness of 28 GPa (the hardness of TiN and SiNx coatings was around 21 GPa) and a lower oxidation rate under dry air at 600 °C. Our results show for the first time that AP/FBR-CVD can be tuned for the deposition of nanocomposite ceramic coatings.",

keywords = "Coating, Fluidized bed, Nanocomposite, Silicon nitride, Titanium nitride",

author = "J. Perez-Mariano and Lau, \{K. H.\} and A. Sanjurjo and J. Caro and D. Casellas and C. Colominas",

note = "Funding Information: The authors wish to thank the following companies and institutions for their collaboration: CTM Centre Tecnol{\`o}gic, Institut Qu{\'i}mic de Sarri{\`a}, SRI International and Tratamientos T{\'e}rmicos Carreras. JP gratefully acknowledges the financial support of DURSI (Generalitat de Catalunya) and the European Social Fund.",

year = "2006",

month = dec,

day = "4",

doi = "10.1016/j.surfcoat.2006.03.029",

language = "English",

volume = "201",

pages = "2217--2225",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

number = "6",

}

TY - JOUR

T1 - TiSiN nanocomposite coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)

AU - Perez-Mariano, J.

AU - Lau, K. H.

AU - Sanjurjo, A.

AU - Caro, J.

AU - Casellas, D.

AU - Colominas, C.

N1 - Funding Information: The authors wish to thank the following companies and institutions for their collaboration: CTM Centre Tecnològic, Institut Químic de Sarrià, SRI International and Tratamientos Térmicos Carreras. JP gratefully acknowledges the financial support of DURSI (Generalitat de Catalunya) and the European Social Fund.

PY - 2006/12/4

Y1 - 2006/12/4

N2 - TiSiN nanocomposite coatings were deposited on stainless steel by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) by reaction of TiCl4 and SiCl4 with NH3 at 850 °C. Coatings were characterized by means of GD-OES, XPS and XRD. TiSiN coatings with a Si content of 9 at.% showed a hardness of 28 GPa (the hardness of TiN and SiNx coatings was around 21 GPa) and a lower oxidation rate under dry air at 600 °C. Our results show for the first time that AP/FBR-CVD can be tuned for the deposition of nanocomposite ceramic coatings.

AB - TiSiN nanocomposite coatings were deposited on stainless steel by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) by reaction of TiCl4 and SiCl4 with NH3 at 850 °C. Coatings were characterized by means of GD-OES, XPS and XRD. TiSiN coatings with a Si content of 9 at.% showed a hardness of 28 GPa (the hardness of TiN and SiNx coatings was around 21 GPa) and a lower oxidation rate under dry air at 600 °C. Our results show for the first time that AP/FBR-CVD can be tuned for the deposition of nanocomposite ceramic coatings.

KW - Coating

KW - Fluidized bed

KW - Nanocomposite

KW - Silicon nitride

KW - Titanium nitride

UR - https://www.scopus.com/pages/publications/33751016647

UR - https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=pure_univeritat_ramon_llull&SrcAuth=WosAPI&KeyUT=WOS:000244831800014&DestLinkType=FullRecord&DestApp=WOS_CPL

U2 - 10.1016/j.surfcoat.2006.03.029

DO - 10.1016/j.surfcoat.2006.03.029

M3 - Article

AN - SCOPUS:33751016647

SN - 0257-8972

VL - 201

SP - 2217

EP - 2225

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 6

ER -

TiSiN nanocomposite coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)

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