@article{d801888e72604ff3b46a0af484d167c3,
title = "TiSiN nanocomposite coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)",
abstract = "TiSiN nanocomposite coatings were deposited on stainless steel by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) by reaction of TiCl4 and SiCl4 with NH3 at 850 °C. Coatings were characterized by means of GD-OES, XPS and XRD. TiSiN coatings with a Si content of 9 at.% showed a hardness of 28 GPa (the hardness of TiN and SiNx coatings was around 21 GPa) and a lower oxidation rate under dry air at 600 °C. Our results show for the first time that AP/FBR-CVD can be tuned for the deposition of nanocomposite ceramic coatings.",
keywords = "Coating, Fluidized bed, Nanocomposite, Silicon nitride, Titanium nitride",
author = "J. Perez-Mariano and Lau, {K. H.} and A. Sanjurjo and J. Caro and D. Casellas and C. Colominas",
note = "Funding Information: The authors wish to thank the following companies and institutions for their collaboration: CTM Centre Tecnol{\`o}gic, Institut Qu{\'i}mic de Sarri{\`a}, SRI International and Tratamientos T{\'e}rmicos Carreras. JP gratefully acknowledges the financial support of DURSI (Generalitat de Catalunya) and the European Social Fund.",
year = "2006",
month = dec,
day = "4",
doi = "10.1016/j.surfcoat.2006.03.029",
language = "English",
volume = "201",
pages = "2217--2225",
journal = "Surface and Coatings Technology",
issn = "0257-8972",
publisher = "Elsevier B.V.",
number = "6",
}