Extended X-ray absorption fine structure (EXAFS) investigations of Ti bonding environment in sputter-deposited nanocomposite TiBC/a-C thin films

J. L. Endrino, M. D. Abad, R. Gago, D. Horwat, I. Jiménez, J. C. Sánchez-López

Producció científica: Article en revista indexadaArticle de conferènciaAvaluat per experts

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Resum

In this study, we have successfully used the extended X-ray absorption fine structure (EXAFS) technique at the Ti-K edge to extract the local structure in a set of nanocomposite TiBC/a-C coatings deposited by a combined d.c.-pulsed and r.f.-magnetron sputtering deposition process. The sequence of Fourier transform spectra in the deposited films shows that there is an increase in the number of Ti-C bonds in the films of higher carbon content in parallel with the increment of the total carbon content. In addition, Ti-K EXAFS spectra indicate that in all the deposited TiBC/a-C films, first-shell neighbours are in a nearer structural arrangement than the one expected for a bulk hexagonal TiB2, which could be due to the formation of mixed Ti-B-C compound in a structural unit similar to the one found in h-TiB2.

Idioma originalAnglès
Número d’article012012
RevistaIOP Conference Series: Materials Science and Engineering
Volum12
Número1
DOIs
Estat de la publicacióPublicada - 2010
Publicat externament
Esdeveniment4th International Conference on Innovation in Thin Film Processing and Characterization, ITFPC 2009 - Nancy, France
Durada: 17 de nov. 200920 de nov. 2009

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