Automated In-line Metrology for Nanoscale Production

Knowing the mechanical properties of workpieces and machine-tools also at the nanometer scale is an absolute necessity for an efficient nanoscale production. Current technologies are lacking the flexibility and robustness needed for measuring such key parameters as topography, morphology, roughness, adhesion, or micro- and nano-hardness directly in a production environment. This hinders rapid development cycles and resource efficient process and quality control. The following technology and methodology gaps for addressing these challenges were identified: Efficient disturbance rejection and systems stability; robustness and longevity of probes; short time to data (i.e. high-speed measurements and data handling); and traceability of the measurement.
The project aim4np strives at solving this problem by combining measuring techniques developed in nanoscience with novel control techniques from mechatronics and procedures from traceable metrology.